DOC《2005届硕士研究生学位论文摘要》

2005届硕士研究生学位论文摘要 机械电子工程 论文题目:物理气相沉积Ti-Si-N纳米复合薄膜生长过程的计算机仿真研究 The Simulation of Ti-Si-N Codeposition Nanocomposite Films Growth with PVD 研究生姓名:王新蒙 导师姓名:刘学杰 教授 专业:机械电子工程 摘要: 物理气相沉积(PVD)技术作为薄膜材料制备的主要方法之一,其在机械制造业中的应用主要集中在切削刀具表面的强化.

Ti-Si-N纳米复合薄膜由于比单一TiN薄膜具有较好的综合机械性能,因此成为硬质薄膜材料研究的主要方向之一.本课题以Ti、Si、N三种粒子共沉积形成的纳米复合硬质薄膜为研究对象,初步尝试用计算机来模拟在单质Ti薄膜和Ti-Si-N三元薄膜生长过程中,入射粒子的吸附、扩散、凝聚成核、团簇长大等行为.通过对模拟结果的分析,来研究沉积过程参数的变化对薄膜微观组织及形貌的影响. 本文在总结蒙特卡罗(MC)和分子动力学(MD)这两种计算机模拟方法各自特点的基础上,采用将微观粒子动力学与Monte Carlo方法相结合的KMC(Kinetic Monte Carlo)方法来做为本课题研究的计算机模拟方法.该KMC模型引入了活粒子的概念,充分考虑了表面所有活粒子都有发生迁移运动的可能,同时也考虑到每次跃迁运动发生后所引起的周围近邻粒子运动状态的变化.通过给每个团簇赋以不同的颜色,得到了所需的团簇统计数据.本仿真软件的设计是在Visual Basic6.0的集成开发环境中进行,用户可方便地输入待考察的参数值,并实时观察表面粒子的运动状态. 模拟结果表明,在金属Ti膜生长过程中,当基底温度较低时,成核数目较多,但团簇尺寸较小;

当基底温度较高时,形成大尺寸团簇的概率增加,团簇之间的空隙较小.模拟数据也显示薄膜表面粗糙度随温度升高而变得光滑.随粒子入射速率的增加,薄膜生长呈现三维岛状生长模式,薄膜表面粗糙度也随之增加.另外,统计结果也显示出,沉积粒子与基底粒子结合力较强.在金属Ti膜仿真结果的基础上,在此项研究中对Ti-Si-N三元薄膜的生长进行情况进行了初步的计算机模拟试验(包括换位机制和不换位机制、激活能参数调节、温度调节等),这使我们对Ti-Si-N形成纳米复合相的机制有了一些了解,并且为进一步的研究奠定了一个很好的基础. 关键词:物理气相沉积,计算机模拟,薄膜生长,团簇,动力学蒙特卡罗方法 ABSTRACT One of important applications in machine manufacturing of physical vapor deposition (PVD) is the wear resistance coatings of cutting tools. The study on Ti-Si-N ternary nanocomposition coatings becomes a hot research point for searching novel hard coatings because it has good mechanical properties than simple binary alloy TiN. In this research, we try to simulate film growth process of Ti coatings and Ti-Si-N coatings which formed by co-depositing Ti, Si and N particles, including adsorption of incidence particle, diffusion, nucleation, growth of cluster, and so on. The effects of process parameters on microscopic structure and morphology of coatings are discussed by analyzing the simulation results. We try to improve the simulation algorithm, make own KMC programs, and simulate the movement of adsorption particle on the surface, which based on an understanding of the characteristics and limitations of Monte Carlo method and Molecular Dynamics method. In our model, the concept of active particle is introduced. We consider not only the hopping possibilities of all the active particles on the surface but also the interaction changes happened between near neighbour particles after every hop. We get statistic data of clusters by distinguishing different colors which clusters possesed. This software is designed under the Visual Basic6.0 environment. User can input variables conveniently and watch the movement of particles. For the deposition process of metal Ti, the simulation results showed that the number of nucleation point is relative large and the size of clusters is small when temperature is low. By contraries, the possibilities of forming larger cluster increased and spacing between clusters diminished with clear crystal boundary. And data displayed that roughness became smooth. The growth of film was in the model of 3D Volver Weber and the surface roughness increased with incidence velocity raising. In addition, statistical data showed strong interaction force between adatom and substrate. Based on Ti films growth simulation, we executed the simulation of Ti-Si-N ternary film growth under different conditions, from which we have got better understanding about the formation of Ti-Si-N nanocomposition coatings. Key words: Physical Vapor Deposition(PVD), Computer Simulation, Film Growth, Cluster, Kinetic Monte Carlo Method(KMC) 论文题目:基于订单生产的面向地方中小型制造企业ERP系统的研究与开发 Research and Development of ERP System for Local Small and Medium Manufacturing Enterprise of Make to Order 研究生姓名:董晓慧 导师姓名:杨建鸣 教授 专业:机械电子工程 摘要: ERP,即企业资源计划,是二十世纪九十年代发展起来的综合企业管理信息系统.它代表了未来企业管理的发展方向和必然趋势.随着信息技术的不断发展,中小型制造企业信息化建设变得越来越重要,为了适应当前信息社会激烈的市场竞争,中小型制造企业有必要实施先进的ERP系统来提高企业自身的竞争力,同时,许多中小型制造企业采用的是基于订单生产的生产模式,强调以销定产.那么,如何有效的解决基于订单生产的中小型制造企业资源计划问题,把客户订单的信息有效地导入到生产企业的ERP系统,并及时地生产出客户需要的产品显得尤其重要.本课题针对这一主题展开研究,开发了一套基于订单生产的面向地方中小型制造企业的ERP系统. 论文首先介绍了ERP的发展历程、作用、趋势以及制造业生产类型,特别阐述了基于订单生产的面向地方中小制造企业的ERP软件的开发与研究的内容和目标.重点介阐述了ERP系统的需求分析,系统结构设计,重点是B/S模式和C/S模式相结合的信息系统开发技术,数据库设计,模块结构设计,部分功能界面设计和程序代码实现. 之后,本文介绍了所开发的ERP系统的实施,ERP系统的运行、使用和维护方法.最后论文提出了进一步的研究方向. 关键词:ERP 订单生产 C/S B/S 数据库 实施 ABSTRACT ERP, that is Enterprise Resource Planning, is a synthetic enterprise management message system developed in the 90s of 19# century. It shows the direction and tendency of enterprise management in the future. With the development of information technology, information small and medium manufacturing enterprise become more and more important. In order to adapt to the current intensive market competition, the small and medium manufacturing enterprise should boost their competitive ability by putting the enterprise resource planning system in practice. At the same time currently many enterprises'