PDF《金刚石抛光用钨合金的热压烧结》

第 卷第 期 中国有色金属学报 年月25

3 2015

3 Volume

25 Number

3 The Chinese Journal of Nonferrous Metals March

2015 文章编号:1004-0609(2015)-03-0682-08 金刚石抛光用钨合金的热压烧结 林佳志,金洙吉,史双佶,钟秀虹,姜冠楠 (大连理工大学 精密与特种加工教育部重点实验室,大连 116024) 摘要:为了获得适用于摩擦化学抛光单晶金刚石用的高性能 W-Mo-Cr 合金抛光材料,采用机械合金化法制备 的微细 W-Mo-Cr 合金粉末为原料,研究热压烧结参数(烧结温度、压力和保温时间)对材料致密度和硬度的影响, 并采用扫描电镜(SEM)对材料的显微组织进行观察.

结果表明:采用机械合金化和热压固相烧结相结合的方法可 以制备出高致密度、 高硬度的合金材料, 合金材料组织致密, 平行精度良好;

在烧结温度为

1400 ℃、 压力为

30 MPa、 保温时间为

30 min 的工艺条件下,所制备的 W-Mo-Cr 合金材料相对密度为 96.49%,硬度为 777.78HV. 关键词:金刚石;

W-Mo-Cr 合金;

抛光;

热压烧结;

相对密度;

硬度 中图分类号:TF125 文献标志码:A Hot pressing sintering process of tungsten alloy for polishing diamond LIN Jia-zhi, JIN Zhu-ji, SHI Shuang-ji, ZHONG Xiu-hong, JIANG Guan-nan (Key Laboratory for Precision and Nontraditional Machining Technology, Ministry of Education, Dalian University of Technology, Dalian 116024, China) Abstract: In order to obtain high-performance W-Mo-Cr alloy material which is suitable for polishing diamond by dynamic friction polishing, the micro W-Mo-Cr composite powder prepared by mechanical alloying was used as original material. Through controlling the hot pressing sintering process, the effects of sintering temperature, pressure, holding time on the density, hardness and micro structure of the alloy materials were investigated. The results show that W-Mo-Cr alloy materials with high density and high hardness can be prepared by the method of mechanical alloying combining with hot pressing solid phase sintering, and the component of the materials can keep dense, the parallel precision of the materials is excellent. The materials with high density were fabricated under the processing conditions of sintering temperature of

1400 ℃, pressure of

30 MPa and holding time of

30 min. The relative density of materials is 96.49%, and the hardness is 777.78HV. Key words: diamond;

W-Mo-Cr alloy;

polishing;

hot pressing sintering;

relative density;

hardness 单晶金刚石刀具在机械加工领域尤其是超精密加 工领域有着重要地位,并被广泛用于加工航空航天中 的关键部件、精密光学器件、半导体硅片、光盘基片、 有色金属和非金属超精密零件,被认为是复杂型面超 精密切削加工的最佳刀具材料[1?2] . 单晶金刚石具备优 异的物理和化学性质,使得单晶金刚石的加工制造工 艺的难度很大.为了实现单晶金刚石的高效高质量加 工,目前,国内外很多方法被广泛地研究,包括机械 抛光、热化学抛光、离子束抛光、化学辅助机械抛光、 等离子化学抛光、氧化烧蚀和激光烧蚀等,但这些抛 光方法几乎都无法兼顾金刚石加工的效率与精度,设 备简易低廉等方面.因此,实现单晶金刚石加工的高 基金项目:国家重点基础研究发展计划资助项目(2011CB706704);

创新研究群体科学基金资助项目(51321004) 收稿日期:2014-07-13;

修订日期:2014-12-04 通信作者:金洙吉,教授,博士;