PDF《Hena 101》

Hena

101 Hena 101, 3-phase motor, 190-208/380-415 V,

50 Hz;

220- 230/440-460 V,

60 Hz Powerful rotary vane pump with a pumping speed up to

120 m3/h 3-phase motor for 190-208/380-415 V,

50 Hz or 22-230/440-460 V,

60 Hz supply voltages Integrated safety valve For all low and medium vacuum applications Gas ballast permanently open, ball valve available as accessory Dimensions www.

hakuto-vacuum.cn www.hakuto-vacuum.com.tw Page

2 Technical Data Hena 101, 3-phase motor, 190-208/380-415 V,

50 Hz;

220-230/440-460 V,

60 Hz Ambient temperature 12-40?°C | 53.6-104?°F | 285-313?K Cooling method, standard Air Dimensions (L x W x H) 703?x?408?x?293?mm3/ Emission sound pressure level without gas ballast at

50 Hz ≤65?dB?(A) Emission sound pressure level without gas ballast at

60 Hz ≤68?dB?(A) Exhaust pressure, max. Atmospheric?pressure Exhaust pressure, min. Atmospheric?pressure Flange (in) Female?thread?G?1??" Flange (out) Female?thread?G?1??" Gas ballast Yes,?without?shut-off?valve Leak rate safety valve ≤?8?・?10-3 Pa m3/s | ≤?6?・?10-2 Torr l/s | ≤?8?・?10-2 mbar l/s Mains requirement: voltage (range) ±5?% Mains requirement: voltage

50 Hz 190-208/380-415?V Mains requirement: voltage

60 Hz 220-230/440-460?V Operating fluid P3 Operating fluid filling 2?l Protection category IP55 Pumping speed at

50 Hz 100?m3/h Pumping speed at

60 Hz 120?m3/h Rated power

50 Hz 2,7?kW Rated power

60 Hz 3.4?kW Rotation speed at

50 Hz 1500?min-1 Rotation speed at

60 Hz 1800?min-1 Ultimate pressure with gas ballast ≤1.5?hPa | ≤1.12?Torr | ≤1.5?mbar Ultimate pressure without gas ballast ≤0.3?hPa | ≤0.23?Torr | ≤0.3?mbar Weight 77?kg | 169.75?lb Ultimate pressure according to PNEUROP Order number Hena

101 PK D03

350 Accessories Accessories FAK 040, activated carbon filter PK Z30

008 KAS 40, condensate separator for pumping speeds up to

120 m3/h PK Z10

008 Accessories HenaLine Flange DN

40 ISO-K - G

1 ?" PK

300 525 P3, mineral oil,

1 l PK

001 106 -T P3, mineral oil,

20 l PK

001 108 -T P3, mineral oil,

5 l PK

001 107 -T Pressure gauge for monitoring the operating fluid separator G 3/4" PK

100 126 SAS 40, dust separator, DN

40 ISO-KF, polyester filter PK Z60

510 www.hakuto-vacuum.cn www.hakuto-vacuum.com.tw Page

3 Are you looking for a perfect vacuum solution? Please contact us: 伯东企业(上海)有限公司 T +021 5046-3511 [email protected] www.hakuto-vacuum.cn www.hakuto-vacuum.com.tw 上海伯东--您理想的真空合作伙伴! 伯东公司成立于1953 年,全球范围内有一千七百名员工.伯东企业(上海)有限公司(www.hakuto-vacuum.cn) 主要从事半导体设备、电子零部件加工、销售及相关服务工作,集团年营业额约为100亿人民币.伯东公司 在国内主要城市:北京、苏州、广州、深圳、成都及厦门设有营业据点. 上海伯东真空产品事业部秉承为广大中国客户提供世界一流的真空产品、推动中国真空工艺发展、承担企业 社会责任为经营理念,已累计为超过10,000家企业提供真空服务,覆盖工业、半导体、镀膜、科研和分析行 业. 上海伯东代理品牌包含:德国Pfeiffer 全系列真空产品、美国 KRI 离子源、美国Brooks Polycold 制冷机,美国HVA 真空阀门,美国 inTEST(Temptronic)高速温度循环测试机,离子蚀刻机,真空镀膜系统及配套真空零 配件等. 上海伯东作为国际知名真空品牌指定授权代理商,全权负责在中国地区的销售和维修服务,100% 使用原厂 进口零部件以及国外受训维修工程师;