PDF《基于太赫兹片上系统微带线的设计与仿真》

第15 卷第2期太赫兹科学与电子信息学报 Vo1.

15, No.

2 2017 年4月Journal of Terahertz Science and Electronic Information Technology Apr. ,

2017 文章编号:2095-4980(2017)02-0178-05 基于太赫兹片上系统微带线的设计与仿真 张聪a,b,c ,苏波a,b,c* ,范宁a,b,c ,张盛博 a,b,c ,张存林 a,b,c (首都师范大学 a.北京市教育部太赫兹波谱与成像重点实验室;

b.太赫兹光电子学重点实验室;

c.北京成像技术高精尖创新中心,北京 100048) 摘要:太赫兹片上系统是一种将太赫兹产生和探测装置以及波导传输装置集成在同一基片 上的设计,应用于晶体材料的共振吸收以实现对太赫兹时域光谱的探测.太赫兹产生与探测装置 都由光电导天线构成,波导传输装置由微带线构成.微带线是一种能够传输高频电磁波的波导结 构,但相比于自由空间波导具有高损耗和散射特性.为了研究微带线的结构参数对太赫兹波传输 损耗的影响,采用模拟仿真的方法,得出了传输损耗随着传输长度和频率的增加而增加,随着微 带线金属层厚度与介质层厚度的增加而减少的规律,从而证明了传输损耗的减少能够通过合理设 计微带线结构来实现. 关键词:太赫兹片上系统;

太赫兹波;

微带线;

损耗;

仿真 中图分类号: TN817 文献标志码: A doi: 10.11805/TKYDA201702.0178 Design and simulation of microstrip line based on an on-chip terahertz system ZHANG Cong a,b,c ,SU Bo a,b,c* ,FAN Ning a,b,c ,ZHANG Shengbo a,b,c ,ZHANG Cunlin a,b,c (a.Beijing Key Laboratory for Terahertz Spectroscopy and Imaging;

b.Key Laboratory of Terahertz Optoelectronics,Ministry of Education;

c.Beijing Advanced Innovation Center for Imaging Technology,Department of Physics,Capital Normal University,Beijing 100048,China) Abstract: On-chip terahertz system is a design which integrates terahertz generation device, detection device and waveguide transmission device on to the same substrate. It is utilized to measure the spectral absorption of crystal materials to achieve the function of terahertz time-domain spectroscopy (THz-TDS) system. The terahertz generation device and detection device are photoconductive antennas and the waveguide transmission device is Microstrip Line(MSL). MSL can transmit high frequency electromagnetic waves, but it also shows a higher attenuation and dispersion compared with the free-space waveguide. In order to study the influence of the structural parameters of microstrip lines on the transmission loss of terahertz wave, simulation is performed to show that the transmission loss increases with the increase of transmission length and frequency. At the same time, with the increase of the thickness of metal layer and dielectric layer, the transmission loss reduces gradually, thus proving that the reduction of transmission loss can be achieved through the rational design of microstrip line structure. Keywords:on-chip terahertz system;

terahertz wave;

microstrip line;

loss;

simulation 太赫兹波是指频率在 0.1~10 THz(波长在 30~3

000 μm)之间的电磁波,其波段位于微波和红外之间,是处于 由宏观电子学向微观光子学过渡的特殊位置.近十几年来超快激光技术和半导体材料科学与技术的迅速发展,为 太赫兹脉冲的产生提供了稳定、可靠的激发光源,推动了太赫兹应用系统的发展,促进了太赫兹在光谱学和成像 技术方面的广泛应用[1] .太赫兹时域光谱系统是利用飞秒激光对光电导材料或电光材料进行激发产生太赫兹脉 冲,通过太赫兹脉冲与样品的相互作用携带样品信息,并利用相干探测原理得到样品频域信息的装置.该系统已 经能够对大量的物质进行频谱分析,在半导体、药品和生物分子等领域的研究分析中发挥着重要作用[2] .尽管太 赫兹时域光谱系统应用广泛,但由于采用此系统对样品进行频谱分析时,所需样品量太大,光谱分辨率较低,水 对太赫兹强烈的吸收作用以及系统尺寸太大无法实现便携等缺点[3] ,使得该系统的进一步应用发展被限制.有鉴 收稿日期:2016-09-22;